Surface acoustic wave properties of zinc oxide film on quartz substrate

Substrates for surface acoustic wave (SAW) devices having various characteristics are realized by combining piezoelectric zinc oxide (ZnO) film and various substrates. This paper reports the following results: (I) the author realized Rayleigh SAW substrates having an appropriate electromechanical coupling factor (k(s)(2) = 0.01-seven times that of ST-cut X-propagation quartz), a good temperature coefficient of frequency (TCF similar or equal to 1 ppm/degrees C), and a zero power flow angle by combining ZnO film and an ST-cut 35 degrees X-propagation quartz substrate, and (2) the author realized a high mode of leaky SAW substrates having a high velocity and a good TCF (similar or equal to 1 ppm/degrees C) by combining the ZnO film and an ST-cut 90 degrees X-propagation quartz substrate. (C) 2000 Scripta Technica, Electron Comm Jpn Pt 2, 83(10): 1-9, 2000.