Design, Modeling and Simulation of CMOS-MEMS Resonator for Biomedical Application

CMOS-MEMS resonators have found a broad usage in mass sensing applications especially in biomedical field. This paper reports theoretical calculations and Finite Element Method (FEM) simulation for a proposed microresonator for detection of acetone in exhaled breath as biomarker for diabetes. The resonator is 760 mu m long and 340 mu m wide with 1.461ng effective mass, 21.331 kHz natural resonance frequency, and 8.867 mHz/pg mass sensitivity. Deposition of 4 mu m sensitive layer gives 781 mu Hz/ppm gas concentration sensitivity with minimum concentration detection of 1.28 ppm. The operating voltage of this resonator is below 50 V and the static sensing capacitance is 90.84 fF. Due to the reasonable mass sensitivity of the resonator, it could be used for mass sensing applications.