Radiation Filters for the Terahertz Range Using Total Internal Reflection Phenomenon

被引：0

作者：

Syrneva, Aleksandra S. ^{[1
]}

Chesnokov, Vladimir V. ^{[1
]}

Checnokov, Dimetriy V. ^{[1
]}

机构：

[1] Siberian State Geodes Acad, Novosibirsk, Russia

来源：

2009 INTERNATIONAL SCHOOL AND SEMINAR ON MODERN PROBLEMS OF NANOELECTRONICS, MICRO- AND NANOSYSTEM TECHNOLOGIES | 2009年

关键词：

Optical filter; silicon prism; plane;

D O I：

10.1109/INTERNANO.2009.5335624

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

The optical filter under development employing frustrated total internal reflection is a micro-mechanical device containing two silicon rectangular prisms. There is a flat silicon plane among hypotenuse edges of the prisms. The silicon plane is a Fabry-Perot resonator, with clearances h, among the plate and prism edges being its mirrors. Theoretical resolution of the optical filter would be R approximate to 1.5.10(3) if h(1) = 50 mu m and R approximate to 3.10(5) if h(1) = 100 mu m with the thickness of the silicon plane being h = 65 mu m; wavelength lambda = 100 mu m; free spectral region Delta lambda/lambda approximate to 0,3...0,4, transmission in the maximum of spectral characteristics 0,6 (provided input and output silicon prism legs bloom).

引用

页码：110 / 112

页数：3