A high-resolution measurement system for surface profile of electric contact

被引：0

作者：

Ebara, Y ^{[1
]}

Sone, H

Nemoto, Y

Takagi, T

机构：

[1] Tohoku Univ, GSIS, Sendai, Miyagi 9808579, Japan

[2] Nihon Univ, Coll Engn, Koriyama, Fukushima 9638642, Japan

来源：

IEICE TRANSACTIONS ON ELECTRONICS | 1998年 / E81C卷 / 03期

关键词：

electric contact; surface profile measurement; focal length; high-resolution;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We discussed on relationship between the width of slit ray and the accuracy of the measurement system for surface profile of electric contact. To obtain resolution of 10[mu m], we designed the mechanism which keeps constant the focal length between the object and the lens. As a result, the width of slit ray was clear in the whole surface. A section image could measured exactly and enhanced the resolution.

引用

页码：432 / 434

页数：3