Inclined Substrate Deposition of Biaxially Textured Magnesium Oxide Films

Inclined substrate deposition (ISD) has great potential for rapid production of high-quality textured template films. We have grown biaxially aligned magnesium oxide (MgO) films on metallic substrates by ISD at deposition rates, 20-100 angstrom/sec. Scanning electron microscopy of the ISD MgO films showed columnar grain structures with a roof-tile-shaped surface. X-ray diffraction and pole Figure analysis revealed that the c-axis of the ISD MgO is tilled at an angle with respect to the substrate normal. Roughly a film thickness of 0.5 mu m is required to obtain ISD MgO films with good biaxial texture. tri-plane alignment, tilt angle, and surface roughness are dependents of inclination angle. With a 0.5 mu m thick homoepitaxial coating over 1.5 mu m thick ISD MgO, we measured full width at half maximum (FWHM) of approximate to 10 degrees for samples grown with inclination angle >30 degrees, Highly textured YBCO films were deposited by pulsed laser deposition (PLD) on the ISD MgO template films grown on metal tapes. The orientations of YBCO films are dependent on buffer materials. "c-axis aligned" YBCO films were obtained using yttria-stabilized zirconia (YSZ) and ceria (CeO2) buffer layers. "c-axis tilted" YBCO films were fabricated on ISD MgO template using SrRuO3 (SRO) and SrTiO3 (STO) buffer films. Critical current density J(c) approximate to 1.2 x 10(6) A/cm(2) and J(c) approximate to 1.6 x 10(6) A/cm(2) were measured at 77 K in self-field on c-axis oriented and c-axis tilted YBCO films, respectively.