Size-dependent large-amplitude oscillations of microcantilevers

被引:5
作者
Ghayesh, Mergen H. [1 ]
Farokhi, Hamed [2 ]
机构
[1] Univ Adelaide, Sch Mech Engn, Adelaide, SA 5005, Australia
[2] McGill Univ, Dept Mech Engn, Montreal, PQ H3A 0C3, Canada
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2017年 / 23卷 / 08期
关键词
PULL-IN ANALYSIS; NONLINEAR DYNAMICS; BEHAVIOR; BEAM; VIBRATION; SYSTEM; MODEL;
D O I
10.1007/s00542-016-3203-x
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The size-dependent oscillations of a microcantilever with a tip (end) mass and a spring support undergoing a large-amplitude motion is analysed theoretically, taking into account curvature-related nonlinearities. Modelling small-size effects via use of the modified couple stress theory, the size-dependent potential and kinetic energies of the system are obtained. The continuous models for the motion behaviour of the microcantilever are developed via use of an energy method on the basis of Hamilton's principle. Application of the centreline-inextensibility in oscillation course of the microcantilever results in a continuous model of the system with nonlinear inertial terms, which when coupled with curvature nonlinearities produces a highly nonlinear system. A weighted-residual method is then employed to truncate the continuous model, yielding the reduced-order model of the microcantilever motion with a generalised-coordinate-dependent mass matrix (due to inertial nonlinearities); a coupled continuation-time-integration method is then employed for the numerical simulations. The large-amplitude oscillation behaviour of the system is examined by constructing the frequency-responses and force-responses. The effect of the size of the end-mass on the nonlinear oscillation behaviour of the microcantilever is analysed. The importance of taking into account different nonlinearity sources is discussed. It is shown that the modified couple stress theory results in a stronger softening behaviour when compared to the classical continuum mechanics.
引用
收藏
页码:3477 / 3488
页数:12
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