One-Step Synthesis of Metal/Semiconductor Heterostructure NbS2/MoS2

被引:109
作者
Fu, Qundong [1 ]
Wang, Xiaowei [2 ]
Zhou, Jiadong [1 ]
Xia, Juan [3 ]
Zeng, Qingsheng [1 ]
Lv, Danhui [2 ]
Zhu, Chao [1 ]
Wang, Xiaolei [4 ]
Shen, Yue [5 ]
Li, Xiaomin [5 ]
Hua, Younan [5 ]
Liu, Fucai [1 ]
Shen, Zexiang [3 ]
Jin, Chuanhong [2 ]
Liu, Zheng [1 ]
机构
[1] Nanyang Technol Univ, Sch Mat Sci & Engn, Singapore 639798, Singapore
[2] Zhejiang Univ, Sch Mat Sci & Engn, State Key Lab Silicon Mat, Hangzhou 310027, Zhejiang, Peoples R China
[3] Nanyang Technol Univ, Sch Phys & Math Sci, Div Phys & Appl Phys, Singapore 637371, Singapore
[4] Nankai Univ, Inst Modern Opt, Key Lab Opt Informat Sci & Technol, Minist Educ, Tianjin 300071, Peoples R China
[5] Wintech Nano Technol Serv Pte Ltd, Singapore 117684, Singapore
基金
新加坡国家研究基金会; 美国国家科学基金会;
关键词
DER-WAALS HETEROSTRUCTURE; RAMAN-SCATTERING; MOS2; GROWTH; LAYER; TRANSITION; ORIENTATION; TRANSISTORS; NANOSHEETS; SUBSTRATE;
D O I
10.1021/acs.chemmater.7b05117
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Chemical vapor deposition (CVD) has proven its surpassing advantages, such as larger scale, interlayer orientation control, and clean interface, in the synthesis of transitional metal dichalcogenide (TMDC) semiconductor/semiconductor van der Waals (vdW) heterostructures. However, it is suffering problems of high melting points and low chemical reactivity of metal oxide feedstocks in the preparation of high-quality metal/semiconductor (M/S) TMDC vdW heterostructures. Here, for the first time, we report the synthesis of the M/S TMDC vdW heterostructure NbS2/MoS2 via a one-step halide-assisted CVD method, which effectively overcomes the drawbacks of metal oxide precursors. This one-step method provides the high quality and clean interface of the NbS2/MoS2 heterostructure, which has been proved by the transmission electron microscopy characterization. A mechanism that MoS2 finishes the growth first and subsequently serves as a superior substrate for the growth of NbS2 is proposed. This novel method will open up new opportunities in the syntheses of other M/S TMDC vdW heterostructures and will facilitate the research of the TMDC M/S interface.
引用
收藏
页码:4001 / 4007
页数:7
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