Scanning force microscope with atomic resolution in ultrahigh vacuum and at low temperatures

被引:90
作者
Allers, W
Schwarz, A
Schwarz, UD
Wiesendanger, R
机构
[1] Univ Hamburg, Inst Appl Phys, D-20355 Hamburg, Germany
[2] Univ Hamburg, Microstruct Res Ctr, D-20355 Hamburg, Germany
关键词
D O I
10.1063/1.1148499
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We present a new design of a scanning force microscope (SFM) for operation at low temperatures in an ultrahigh vacuum (UHV) system. The SFM features an all-fiber interferometer detection mechanism and can be used for contact as well as for noncontact measurements. Cooling is performed in a UHV compatible liquid helium bath cryostat. The design allows in situ cantilever and sample exchange at room temperature; the subsequent transport of the microscope into the cryostat is done by a specially designed transfer mechanism. Atomic resolution images acquired at various temperatures down to 10 K in contact as well as in noncontact mode are shown to demonstrate the performance of the microscope. (C) 1998 American Institute of Physics.
引用
收藏
页码:221 / 225
页数:5
相关论文
共 28 条
[1]   LOW-TEMPERATURE FORCE MICROSCOPE WITH ALL-FIBER INTERFEROMETER [J].
ALBRECHT, TR ;
GRUTTER, P ;
RUGAR, D ;
SMITH, DPE .
ULTRAMICROSCOPY, 1992, 42 :1638-1646
[2]   AN ATOMIC-RESOLUTION ATOMIC-FORCE MICROSCOPE IMPLEMENTED USING AN OPTICAL-LEVER [J].
ALEXANDER, S ;
HELLEMANS, L ;
MARTI, O ;
SCHNEIR, J ;
ELINGS, V ;
HANSMA, PK ;
LONGMIRE, M ;
GURLEY, J .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (01) :164-167
[3]   ATOMIC FORCE MICROSCOPE [J].
BINNIG, G ;
QUATE, CF ;
GERBER, C .
PHYSICAL REVIEW LETTERS, 1986, 56 (09) :930-933
[4]   IMAGING CRYSTALS, POLYMERS, AND PROCESSES IN WATER WITH THE ATOMIC FORCE MICROSCOPE [J].
DRAKE, B ;
PRATER, CB ;
WEISENHORN, AL ;
GOULD, SAC ;
ALBRECHT, TR ;
QUATE, CF ;
CANNELL, DS ;
HANSMA, HG ;
HANSMA, PK .
SCIENCE, 1989, 243 (4898) :1586-1589
[5]   ATOMIC GEOMETRIES OF THE (110) SURFACES OF III-V-COMPOUND SEMICONDUCTORS - DETERMINATION BY TOTAL-ENERGY MINIMIZATION AND ELASTIC LOW-ENERGY ELECTRON-DIFFRACTION [J].
DUKE, CB ;
MAILHIOT, C ;
PATON, A ;
CHADI, DJ ;
KAHN, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (04) :1087-1088
[6]   Thermal formation of Zn-dopant-vacancy defect complexes on InP(110) surfaces [J].
Ebert, P ;
Heinrich, M ;
Simon, M ;
Domke, C ;
Urban, K ;
Shih, CK ;
Webb, MB ;
Lagally, MG .
PHYSICAL REVIEW B, 1996, 53 (08) :4580-4590
[7]   Fiber interferometer-based variable temperature scanning force microscope [J].
Euler, R ;
Memmert, U ;
Hartmann, U .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (04) :1776-1778
[8]   A LOW-TEMPERATURE ATOMIC FORCE SCANNING TUNNELING MICROSCOPE FOR ULTRAHIGH-VACUUM [J].
GIESSIBL, FJ ;
GERBER, C ;
BINNIG, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02) :984-988
[9]   Stick-slip movement of a scanned tip on a graphite surface in scanning force microscopy [J].
Holscher, H ;
Schwarz, UD ;
Zworner, O ;
Wiesendanger, R .
ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1997, 104 (02) :295-297
[10]   MULTIFUNCTIONAL PROBE MICROSCOPE FOR FACILE OPERATION IN ULTRAHIGH-VACUUM [J].
HOWALD, L ;
MEYER, E ;
LUTHI, R ;
HAEFKE, H ;
OVERNEY, R ;
RUDIN, H ;
GUNTHERODT, HJ .
APPLIED PHYSICS LETTERS, 1993, 63 (01) :117-119