Demonstration of post-growth wavelength setting of VCSELs using high-contrast gratings

被引：46

作者：

Haglund, E. ^{[1
]}

Gustavsson, J. S. ^{[1
]}

Bengtsson, J. ^{[1
]}

Haglund, A. ^{[1
]}

Larsson, A. ^{[1
]}

Fattal, D. ^{[2
]}

Sorin, W. ^{[3
]}

Tan, M. ^{[3
]}

机构：

[1] Chalmers, Dept Microtechnol & Nanosci, Photon Lab, SE-41296 Gothenburg, Sweden

[2] LEIA Inc, 2440 Sand Hill Rd, Menlo Pk, CA 94025 USA

[3] HP Labs, 1501 Page Mill Rd, Palo Alto, CA 94304 USA

来源：

OPTICS EXPRESS | 2016年 / 24卷 / 03期

基金：

瑞典研究理事会;

关键词：

SURFACE-EMITTING LASER; ARRAYS; INTERCONNECTS; DIODES;

D O I：

10.1364/OE.24.001999

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate, for the first time, post-growth wavelength setting of electrically-injected vertical-cavity surface-emitting lasers (VCSELs) by using high-contrast gratings (HCGs) with different grating parameters. By fabricating HCGs with different duty cycle and period, the HCG reflection phase can be varied, in effect giving different optical cavity lengths for HCG-VCSELs with different grating parameters. This enables fabrication of monolithic multi-wavelength HCG-VCSEL arrays for wavelength-division multiplexing (WDM). The GaAs HCG is suspended in air by removing a sacrificial layer of InGaP. Electrically-injected 980-nm HCG-VCSELs with sub-mA threshold currents indicate high reflectivity from the GaAs HCGs. Lasing over a wavelength span of 15 nm was achieved, enabling a 4-channel WDM array with 5 nm channel spacing. A large wavelength setting span was enabled by an air-coupled cavity design and the use of only the HCG as top mirror. (C) 2016 Optical Society of America

引用

页码：1999 / 2005

页数：7

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