Preparation of Ba(Ti,Zr)O3 thick films by screen printing

被引:18
作者
Futakuchi, T
Nakamura, Y
Adachi, M
机构
[1] Toyama Ind Technol Ctr, Toyama 9300866, Japan
[2] Toyama Prefectural Univ, Fac Engn, Dept Elect & Informat, Toyama 9390398, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 11B期
关键词
ferroelectric; piezoelectric; thick film; screen-printing; BaTiO3; BaZrO3;
D O I
10.1143/JJAP.41.6948
中图分类号
O59 [应用物理学];
学科分类号
摘要
BaTi1-xZrxO3 (x = 0-0.1) thick films were prepared by a screen-printing method on Pt bottom electrodes using ceramic substrates in the firing temperature range from 1250degreesC to 1450degreesC. The dielectric, ferroelectric and electric-field-induced strain properties of the thick films were examined in comparison with those of bulk ceramics. The optimum firing temperature to obtain maximum remanent polarization was 1400degreesC for the thick films. The phase transition temperatures were controlled by varying composition x for the thick films as well as the bulk ceramics. The maximum remanent polarization of 14.4 muC/cm(2) for the thick film was obtained at x = 0.025 in the orthorhombic phase.
引用
收藏
页码:6948 / 6951
页数:4
相关论文
共 10 条
  • [1] Preparation of ferroelectric thick film actuator on silicon substrate by screen-printing
    Futakuchi, T
    Yamano, H
    Adachi, M
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (9B): : 5687 - 5689
  • [2] DIFFUSE FERROELECTRIC PHASE-TRANSITIONS IN BA(TI1-YZRY)O3 CERAMICS
    HENNINGS, D
    SCHNELL, A
    SIMON, G
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1982, 65 (11) : 539 - 544
  • [3] GRAIN-SIZE EFFECTS ON DIELECTRIC PROPERTIES IN BARIUM-TITANATE CERAMICS
    KINOSHITA, K
    YAMAJI, A
    [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (01) : 371 - 373
  • [4] Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method
    Lebedev, M
    Akedo, J
    Akiyama, Y
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (9B): : 5600 - 5603
  • [5] Poling field dependence of ferroelectric properties in barium titanate ceramics
    Ogawa, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (9B): : 5630 - 5633
  • [6] Piezoelectric properties of zirconium-doped barium titanate single crystals grown by templated grain growth
    Rehrig, PW
    Park, SE
    Trolier-McKinstry, S
    Messing, GL
    Jones, B
    Shrout, TR
    [J]. JOURNAL OF APPLIED PHYSICS, 1999, 86 (03) : 1657 - 1661
  • [7] Properties and degradation of polarization reversal of soft BaTiO3 ceramics for ferroelectric thin-film devices
    Thongrueng, J
    Tsuchiya, T
    Masuda, Y
    Fujita, S
    Nagata, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9B): : 5309 - 5313
  • [8] Verbitskaia T. N., 1958, SOV PHYS-CRYSTALLOGR, V3, P182
  • [9] Enhanced piezoelectric property of barium titanate single crystals with engineered domain configurations
    Wada, S
    Suzuki, S
    Noma, T
    Suzuki, T
    Osada, M
    Kakihana, M
    Park, SE
    Cross, LE
    Shrout, TR
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (9B): : 5505 - 5511
  • [10] Epitaxial growth of BaTiO3 thin films by high gas pressure sputtering
    Yasumoto, T
    Yanase, N
    Abe, K
    Kawakubo, T
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2000, 39 (9B): : 5369 - 5373