Observing the evolution of regular nanostructured indium phosphide after gas cluster ion beam etching

被引：18

作者：

Barlow, Anders J. ^{[1
]}

Sano, Naoko ^{[2
]}

Murdoch, Billy J. ^{[3
]}

Portoles, Jose F. ^{[2
]}

Pigram, Paul J. ^{[1
]}

Cumpson, Peter J. ^{[2
]}

机构：

[1] La Trobe Univ, CMSS, Dept Chem & Phys, Melbourne, Vic 3086, Australia

[2] Newcastle Univ, Sch Engn, NEXUS, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England

[3] RMIT Univ, Sch Sci, Melbourne, Vic 3001, Australia

来源：

APPLIED SURFACE SCIENCE | 2018年 / 459卷

基金：

英国工程与自然科学研究理事会;

关键词：

Helium ion microscopy; Gas cluster ion beam; Indium phosphide; Nanostructure; XPS; SAN; INP SURFACES; MICROSCOPY; IMAGE;

D O I：

10.1016/j.apsusc.2018.07.195

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Indium phosphide (InP) surfaces develop a pronounced nanostructured texture upon irradiation by energetic ion beams. We have observed the mechanism of nanostructure evolution of InP under irradiation by an Ar gas cluster ion beam (GCIB) using helium ion microscopy (HIM). Initially, metallic indium nanoparticles form on the surface after removal of the top-most oxide layer. These nanoparticles form a mask which shadows the underlying InP. As the ion dose is increased, the masking effect results in substantial nanostructured topography in the form of pillars or nanocones, oriented along the axis of the incident GCIB. The surface sensitivity and high resolution of the HIM facilitates the direct observation of the metallic indium cap at the top of the pillars.

引用

页码：678 / 685

页数：8

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