3D simulation of the image formation in soft x-ray microscopes

被引：6

作者：

Selin, Marten ^{[1
]}

Fogelqvist, Emelie ^{[1
]}

Holmberg, Anders ^{[1
]}

Guttmann, Peter ^{[2
]}

Vogt, Ulrich ^{[1
]}

Hertz, Hans M. ^{[1
]}

机构：

[1] KTH Royal Inst Technol, Albanova, Dept Appl Phys, S-10691 Stockholm, Sweden

[2] Helmholtz Zentrum Berlin Mat & Energie GmbH, Inst Soft Matter & Funct Mat, D-12489 Berlin, Germany

来源：

OPTICS EXPRESS | 2014年 / 22卷 / 25期

基金：

瑞典研究理事会;

关键词：

RESOLUTION; CONTRAST;

D O I：

10.1364/OE.22.030756

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In water-window soft x-ray microscopy the studied object is typically larger than the depth of focus and the sample illumination is often partially coherent. This blurs out-of-focus features and may introduce considerable fringing. Understanding the influence of these phenomena on the image formation is therefore important when interpreting experimental data. Here we present a wave-propagation model operating in 3D for simulating the image formation of thick objects in partially coherent soft x-ray microscopes. The model is compared with present simulation methods as well as with experiments. The results show that our model predicts the image formation of transmission soft x-ray microscopes more accurately than previous models. (C) 2014 Optical Society of America

引用

页码：30756 / 30768

页数：13

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