Investigations on surface reactivity of silicon-carbonitride powders by thermoanalytical methods

被引：3

作者：

Breuning, T ^{[1
]}

Neumann, A ^{[1
]}

Boden, G ^{[1
]}

机构：

[1] Fraunhofer Inst Keram Technol & Sinterwerkstoff, D-01277 Dresden, Germany

来源：

SOLID STATE IONICS | 1997年 / 101卷 / 101-103期

关键词：

pyrolysis; silicon-carbonitride; thermogravimetry; thermogravimetry-evolved gas analysis mass spectrometry;

D O I：

10.1016/S0167-2738(97)00185-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Fine-grained powders of excellent homogeneity represent a requirement for high performance materials based on silicon nitride and silicon carbide. Such powders can be produced by pyrolysis of organometallic precursors. The investigated silicon-carbonitride powders were prepared by gas phase-pyrolysis of disilazane or oligosilazanes under different pyrolysis conditions. On-line coupling of thermogravimetry (TG) with evolved gas analysis (EGA)/mass spectrometry (MS) was applied to characterize the behaviour of powders during annealing processes. The results show clearly the influence of pyrolysis conditions and post-treatment steps on the surface properties of powders.

引用

页码：811 / 817

页数：7

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