Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures

被引：6
作者：
Ensinger, W.
Volz, K.
Baba, K.
Hatada, R.
机构：
[1] Tech Univ Darmstadt, Dept Mat Sci, D-64287 Darmstadt, Germany
[2] Univ Marburg, Dept Phys, D-35032 Marburg, Germany
[3] Univ Marburg, Ctr Mat Sci, D-35032 Marburg, Germany
[4] Ind Technol Ctr Nagasaki, Appl Technol Div, Nagasaki, Japan
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2007年 / 257卷 / 692-695期
关键词：
D O I：
10.1016/j.nimb.2007.01.073
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C-H bonds. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：692 / 695
页数：4
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