Parallel femtosecond laser light sheet micro-manufacturing based on temporal focusing

被引:15
作者
Gu, Chenglin [1 ]
Zhang, Dapeng [1 ]
Wang, Dien [1 ]
Yam, Yeung [1 ]
Li, Chunqiang [2 ]
Chen, Shih-Chi [1 ]
机构
[1] Chinese Univ Hong Kong, Dept Mech & Automat Engn, Shatin, Hong Kong, Peoples R China
[2] Univ Texas El Paso, Dept Phys, El Paso, TX 79968 USA
来源
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | 2017年 / 50卷
基金
美国国家科学基金会;
关键词
Femtosecond laser fabrication; Direct area patterning; Temporal focusing; MICROFABRICATION; EXCITATION;
D O I
10.1016/j.precisioneng.2017.05.006
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We present a parallel depth resolved laser fabrication technique for micro- and nano-machining metal substrates based on temporal focusing. In this system, the spectrum of a femtosecond laser pulse is first spatially separated by a digital micromirror device, which simultaneously serves as a diffraction grating and a programmable binary mask. After collimation and beam flattening, an objective lens recombines the spectrum to the focal region, forming a high-intensity, depth resolved light sheet for laser micro machining. The light sheet technology enables parallel fabrication of highly uniform micro-structures of close to diffraction-limited resolution. Experimental results demonstrate high-resolution (similar to 800 nm) direct area patterning on various metal substrates, e.g., nickel and copper, over an area of similar to 100 x 60 mu m(2) within tens of laser pulses. The relationship among material removal rate, surface flatness, laser power, and number of pulses have been experimentally studied; the results suggest the application of higher power with fewer number of laser pulses produce microstructures of better surface quality. The light sheet technology substantially improves the throughput of ultrafast laser machining, enabling direct area patterning without compromising the resolution. (C) 2017 Elsevier Inc. All rights reserved.
引用
收藏
页码:198 / 203
页数:6
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