Femtosecond laser fabrication of nanostructures in silica glass

被引：63
作者：
Taylor, RS
Hnatovsky, C
Simova, E
Rayner, DM
Bhardwaj, VR
Corkum, PB
机构：
[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
[2] Natl Res Council Canada, Steacie Inst Mol Sci, Ottawa, ON K1A 0R6, Canada
来源：
OPTICS LETTERS | 2003年 / 28卷 / 12期
关键词：
D O I：
10.1364/OL.28.001043
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A femtosecond laser beam focused inside fused silica and other glasses can modify the refractive index of the glass. Chemical etching and atomic-force microscope studies show that the modified region can have a sharp-tipped cone-shaped structure with a tip diameter as small as 100 nm. Placing the structure near the bottom surface of a silica glass sample and applying a selective chemical etch to the bottom surface produces clean, circular, submicrometer-diameter holes. Holes spaced as close to one another as 1.4 mum are demonstrated. (C) 2003 Optical Society of America.
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收藏
页码：1043 / 1045
页数：3
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