Formation of Ag/Al Screen-Printing Contacts on B Emitters

被引：48

作者：

Fritz, Susanne ^{[1
]}

Koenig, Markus ^{[2
]}

Riegel, Stefanie ^{[1
]}

Herguth, Axel ^{[1
]}

Hoerteis, Matthias ^{[2
]}

Hahn, Giso ^{[1
]}

机构：

[1] Univ Konstanz, Dept Phys, D-78464 Constance, Germany

[2] Heraeus Precious Met GmbH & Co KG, Elect Mat Div, Business Unit Photovolta, D-63450 Hanau, Germany

来源：

IEEE JOURNAL OF PHOTOVOLTAICS | 2015年 / 5卷 / 01期

关键词：

Boron emitters; contact formation; metallization; p(+) Si; scanning electron microscopy (SEM); screen-printing; METALLIZATION;

D O I：

10.1109/JPHOTOV.2014.2364117

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

In this study, the contact formation process of Al containing Ag screen-printing pastes to BBr3-based B emitters on Si is investigated. Therefore, a detailed scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy study of top-view and cross-sectional samples was conducted. The possible influence of a SiNx:H antireflection coating was considered by comparing contacts with and without a SiNx:H layer. To analyze the role of the glass frit in the paste, the contact formation of pastes without glass was examined. The results indicate that the Ag/Al contact spots grow below the Si surface/SiNx:H layer. The glass frit is only indispensable for etching the antireflection layer-it is not needed for melting the metal in the screen-printing paste. The realized experiments lead to a phenomenological model for the contact formation process of Al containing screen-printing pastes to boron emitters.

引用

页码：145 / 151

页数：7

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