The post-annealing environment effect on the photoluminescence recovery of ion-irradiated Si nanocrystals

被引:5
作者
Sias, U. S.
Behar, M.
Boudinov, H.
Moreira, E. C.
机构
[1] Univ Fed Rio Grande do Sul, Inst Fis, BR-91501970 Porto Alegre, RS, Brazil
[2] Ctr Fed Educ Tecnol Pelotas, BR-96015370 Pelotas, RS, Brazil
[3] Univ Fed Pelotas, UNIPAMPA, BR-96400970 Bage, RS, Brazil
关键词
silicon nanocrystals; photoluminescence; hot implantation; ion irradiation;
D O I
10.1016/j.nimb.2006.12.112
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In the present work we have investigated the influence of the post-annealing environment on the photoluminescence (PL) recovery of Si nanocrystals after ion irradiation. Samples originally produced by Si implantation into SiO2 matrix at 600 degrees C post-annealed at 1100 degrees C were further bombarded with 2 MeV Si+, at a fluence of Phi = 2 x 10(13) Si/cm(2). After irradiation the original emission, composed by two PL bands, was completely quenched. We shown that the environment of a post-annealing performed at 900 degrees C has a strong effect on the PL emission recovery. The intensity and shape of the PL spectra have revealed to be dependent of the annealing gas (N-2 or Ar), annealing time, as well as the original Si excess. The results are explained on the basis of current theories. (c) D 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:6 / 10
页数:5
相关论文
共 14 条
  • [1] Effect of particle size on the photoluminescence from hydrogen passivated Si nanocrystals in SiO2
    Cheylan, S
    Elliman, RG
    [J]. APPLIED PHYSICS LETTERS, 2001, 78 (13) : 1912 - 1914
  • [2] Fernandez BG, 2002, J APPL PHYS, V91, P798, DOI 10.1063/1.1423768
  • [3] Ultrathin SiOxNy by rapid thermal heating of silicon in N-2 at T=760-1050 degrees C
    Green, ML
    Sorsch, T
    Feldman, LC
    Gusev, EP
    Garfunkel, E
    Lu, HC
    Gustafsson, T
    [J]. APPLIED PHYSICS LETTERS, 1997, 71 (20) : 2978 - 2980
  • [4] VISIBLE PHOTOLUMINESCENCE FROM OXIDIZED SI NANOMETER-SIZED SPHERES - EXCITON CONFINEMENT ON A SPHERICAL-SHELL
    KANEMITSU, Y
    OGAWA, T
    SHIRAISHI, K
    TAKEDA, K
    [J]. PHYSICAL REVIEW B, 1993, 48 (07): : 4883 - 4886
  • [5] Photoluminescence and Raman scattering of silicon nanocrystals prepared by silicon ion implantion into SiO2 films
    Li, GH
    Ding, K
    Chen, Y
    Han, HX
    Wang, ZP
    [J]. JOURNAL OF APPLIED PHYSICS, 2000, 88 (03) : 1439 - 1442
  • [6] Defect production and annealing in ion-irradiated Si nanocrystals -: art. no. 144109
    Pacifici, D
    Moreira, EC
    Franzò, G
    Martorino, V
    Priolo, F
    Iacona, F
    [J]. PHYSICAL REVIEW B, 2002, 65 (14): : 1 - 13
  • [7] Electronic and optical properties of Si/SiO2 nanostructures.: II.: Electron-hole recombination at the Si/SiO2 quantum-well-quantum-dot transition -: art. no. 205325
    Pauc, N
    Calvo, V
    Eymery, J
    Fournel, F
    Magnea, N
    [J]. PHYSICAL REVIEW B, 2005, 72 (20):
  • [8] Mechanism of photoluminescence of Si nanocrystals in SiO2 fabricated by ion implantation:: the role of interactions of nanocrystals and oxygen
    Shimizu-Iwayama, T
    Hole, DE
    Boyd, IW
    [J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 1999, 11 (34) : 6595 - 6604
  • [9] Photoluminescence behavior of Si nanocrystals as a function of the implantation temperature and excitation power density
    Sias, US
    Amaral, L
    Behar, M
    Boudinov, H
    Moreira, EC
    Ribeiro, E
    [J]. JOURNAL OF APPLIED PHYSICS, 2005, 98 (03)
  • [10] Influence of interface relaxation on passivation kinetics in H2 of coordination Pb defects at the (111)Si/SiO2 interface revealed by electron spin resonance
    Stesmans, A
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 92 (03) : 1317 - 1328