Pure CdSiO3 powder was successfully prepared by sol-gel method using Cd(NO3)(2)center dot 4H(2)O and(CH3CH2O)(4)Si (TEOS) as raw materials. The prepared powders were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM) respectively. The effects of the reacting temperature and the calcining time on phase formation and size homogeneity were investigated. The results indicated that the single phase CdSiO3 powders with good homogeneity and good crystallization could be obtained by sol-gel method at 900 degrees C for 2 h. (C) 2009 Elsevier B.V. All rights reserved.