Simultaneous Measurement of Refractive Index and Thickness with a Convergent Beam

被引：0

作者：

Hii, King Ung ^{[1
,2
]}

Kwek, Kuan Hiang ^{[1
]}

机构：

[1] Univ Malaya, Dept Phys, Fac Sci, Kuala Lumpur 50603, Malaysia

[2] Swinburne Univ Technol, Fac Engn Comp & Sci, Kuching 93350, Malaysia

来源：

OPTICAL REVIEW | 2014年 / 21卷 / 05期

关键词：

optical measurements and metrology; refractive index; thickness; optical materials; geometrical optics; LOW-COHERENCE INTERFEROMETRY; TRANSPARENT PLATES; CONFOCAL OPTICS; WAFERS;

D O I：

10.1007/s10043-014-0114-x

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A new approach to the simultaneous measurement of refractive index and thickness based on the focus shifts of a convergent beam intercepted by a test plate is proposed. By using ray optics, a defined focus shift can be derived as a function of the refractive index and thickness as well as the angular position of the test plate with respect to the optical axis. From a pair of focus shifts obtained at two different angular positions, it is shown that the desired measurands can be simultaneously determined without prior knowledge of either parameter. A simulation result for the proposed concept based on graphically solving the equations of their respective focus shifts is presented. (C) 2014 The Japan Society of Applied Physics

引用

页码：705 / 708

页数：4

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