Study on the surface roughness of substrate with multi-fractal spectrum

被引：17

作者：

Gan, Shuyi

Zhou, Qing

Xu, Xiangdong

Hong, Yilin

Liu, Yin

Fu, Shaojun ^{[1
]}

机构：

[1] Univ Sci & Technol China, Natl Synchrotron Radiat Lab, Hefei 230029, Peoples R China

[2] Hefei Univ Technol, Dept Mech Engn, Hefei 230009, Peoples R China

来源：

MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期

关键词：

surface roughness; fractal; multi-fractal spectrum; RMS; AFM image;

D O I：

10.1016/j.mee.2007.01.273

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper applies multi-fractal spectrum theory into surface roughness evaluation in order to eliminate its heavy dependence on sampling position and sampling size. Based on AFM images of various substrates, their partition functions and multi-fractal spectra are calculated. The calculation indicates that the multi-fractal spectra differ significantly from each other for different samples, but are quite similar for the same sample in spite of the random change of sampling position and size, so it can reflect surface feature more objectively and accurately. (c) 2007 Published by Elsevier B.V.

引用

页码：1806 / 1809

页数：4

共 14 条

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