Roughness models for particle adhesion

被引:98
作者
Eichenlaub, S
Gelb, A
Beaudoin, S
机构
[1] Purdue Univ, Sch Chem Engn, W Lafayette, IN 47907 USA
[2] Arizona State Univ, Dept Chem & Mat Engn, Tempe, AZ 85287 USA
[3] Arizona State Univ, Dept Math & Stat, Tempe, AZ 85287 USA
基金
美国国家科学基金会;
关键词
particle adhesion; surface roughness; post-CMP cleaning; Fourier transform;
D O I
10.1016/j.jcis.2004.08.017
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The effects of different surface roughness models oil a previously developed van der Waals adhesion model were examined. The van der Waals adhesion model represented surface roughness with a distribution of hemispherical asperities. It was found that the constraints used to define the asperity distribution on the surface, which were determined from AFM scans, varied with scan size and thus were not constant for all surfaces examined. The greatest variation in these parameters occurred with materials that had large asperities or with materials where a large fraction of the Surface was covered by asperities. These rough Surfaces were modeled with fractals and also with a fast Fourier transform algorithm. When the model Surfaces generated using the Fourier transforms are used in the adhesion model, the model accurately predicts the experimentally observed adhesion forces measured with the AFM. (C) 2004 Elsevier Inc. All rights reserved.
引用
收藏
页码:289 / 298
页数:10
相关论文
共 33 条
[1]   A MULTIVARIATE WEIERSTRASS-MANDELBROT FUNCTION [J].
AUSLOOS, M ;
BERMAN, DH .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1985, 400 (1819) :331-350
[2]   ON THE WEIERSTRASS-MANDELBROT FRACTAL FUNCTION [J].
BERRY, MV ;
LEWIS, ZV .
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1980, 370 (1743) :459-484
[3]   DLVO interaction between rough surfaces [J].
Bhattacharjee, S ;
Ko, CH ;
Elimelech, M .
LANGMUIR, 1998, 14 (12) :3365-3375
[4]  
Burdick GM, 2001, J NANOPART RES, V3, P455
[5]  
BURDICK GM, 2003, IN PRESS J ELECTROCH
[6]   FRACTAL-BASED CHARACTERIZATION OF SURFACE TEXTURE [J].
CHESTERS, S ;
WEN, HY ;
LUNDIN, M ;
KASPER, G .
APPLIED SURFACE SCIENCE, 1989, 40 (03) :185-192
[7]  
Chu E, 2000, COMP MATH SERIES, P3
[8]   Substrate morphology and particle adhesion in reacting systems [J].
Cooper, K ;
Gupta, A ;
Beaudoin, S .
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2000, 228 (02) :213-219
[9]   Adhesion of alumina particles to thin films [J].
Cooper, K ;
Eichenlaub, S ;
Gupta, A ;
Beaudoin, S .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (04) :G239-G244
[10]   Simulation of the adhesion of particles to surfaces [J].
Cooper, K ;
Gupta, A ;
Beaudoin, S .
JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2001, 234 (02) :284-292