High-efficiency diffractive micromachined chopper for infrared wavelength and its application to a pyroelectric infrared sensor

被引：19
作者：
Ueda, M [1 ]
Shiono, T [1 ]
Ito, T [1 ]
Yokoyama, K [1 ]
机构：
[1] Matsushita Elect Ind Co Ltd, Moriguchi, Osaka, Japan
来源：
APPLIED OPTICS | 1998年 / 37卷 / 07期
关键词：
D O I：
10.1364/AO.37.001165
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We have developed a diffractive micromachined chopper (DMC) for an IR wavelength of similar to 10 mu m. This device operates mechanically by movable reflection grating beams. It modulates the diffraction efficiency by controlling the displacement of grating beams by an electrostatic force. For a CO2 laser beam, a high modulation efficiency of 84% with an -0.8-dB small insertion loss was obtained by detecting Oth-order diffracted light. A novel pyroelectric IR microsensor with a DMC and a diffractive multilevel Si microlens was proposed and it demonstrated the detection of human existence. (C) 1998 Optical Society of America.
引用
收藏
页码：1165 / 1170
页数：6
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