Nitrogen dissociation in N2-Ar microwave plasmas

被引：15
|
作者：
Henriques, J [1 ]
Tatarova, E [1 ]
Guerra, V [1 ]
Ferreira, CM [1 ]
机构：
[1] Univ Tecn Lisboa, Ctr Fis Plasmas, Inst Super Tecn, P-1049001 Lisbon, Portugal
来源：
VACUUM | 2002年 / 69卷 / 1-3期
关键词：
nitrogen; argon; atoms; dissociation; modelling;
D O I：
10.1016/S0042-207X(02)00328-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The dissociation degree of nitrogen molecules in a wave-driven N-2-Ar discharge operating at microwave frequency (2.45 GHz) is investigated by means of a theoretical model accounting in a consistent way for the main discharge balances and the wave electrodynamics. The enhancement of N-2 dissociation degree at high At percentage in the mixture is pointed out. (C) 2002 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：177 / 181
页数：5
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