Formation of copper tin sulfide films by pulsed laser deposition at 248 and 355 nm

被引:11
作者
Ettlinger, Rebecca Bolt [1 ]
Crovetto, Andrea [2 ]
Canulescu, Stela [1 ]
Cazzaniga, Andrea [1 ]
Ravnkilde, Lasse [2 ]
Youngman, Tomas [2 ]
Hansen, Ole [2 ]
Pryds, Nini [3 ]
Schou, Jorgen [1 ]
机构
[1] Tech Univ Denmark, DTU Foton, Frederiksborgvej 399, DK-4000 Roskilde, Denmark
[2] Tech Univ Denmark, DTU Nanotech, DK-2800 Lyngby, Denmark
[3] Tech Univ Denmark, DTU Energy, DK-4000 Roskilde, Denmark
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2016年 / 122卷 / 04期
关键词
THIN-FILMS; ABLATION; CU2SNS3; ATMOSPHERE; PRECURSORS; SN2S3; OXIDE; SNS2;
D O I
10.1007/s00339-016-9939-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The influence of the laser wavelength on the deposition of copper tin sulfide (CTS) and SnS-rich CTS with a 248-nm KrF excimer laser (pulse length tau = 20 ns) and a 355-nm frequency-tripled Nd: YAG laser (tau = 6 ns) was investigated. A comparative study of the two UV wavelengths shows that the CTS film growth rate per pulse was three to four times lower with the 248-nm laser than the 355-nm laser. SnS-rich CTS is more efficiently ablated than pure CTS. Films deposited at high fluence have sub-micron and micrometer size droplets, and the size and area density of the droplets do not vary significantly from 248 to 355 nm deposition. Irradiation at low fluence resulted in a non-stoichiometric material transfer with significant Cu deficiency in the as-deposited films. We discuss the transition from a non-stoichiometric material transfer at low fluence to a nearly stoichiometric ablation at high fluence based on a transition from a dominant evaporation regime to an ablation regime.
引用
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页数:10
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