Correlation Algorithm to recover the phase of a test surface using Phase-Shifting Interferometry

被引：11

作者：

Nava-Vega, A

Salas, L

Luna, E

Cornejo-Rodríguez, A

机构：

[1] Univ Nacl Autonoma Mexico, Observ Astron Nacl San Pedro Martir, Inst Astron, Ensenada 22806, Baja California, Mexico

[2] Inst Nacl Astrofis Opt & Electr, Puebla 72000, Mexico

来源：

OPTICS EXPRESS | 2004年 / 12卷 / 22期

关键词：

D O I：

10.1364/OPEX.12.005296

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A correlation algorithm to recover the phase in phase-shifting interferometry is presented. We make numerical simulations to test the proposed algorithm and apply it to real interferograms with satisfactory results. (C) 2004 Optical Society of America.

引用

页码：5296 / 5306

页数：11

共 18 条

[1]

ANGEL JRP, 1988, EUROPEAN SO OBSERVAT, V30, P561

[2]

[Anonymous], 1998, INTERFEROGRAM ANAL O

[3] DIGITAL WAVEFRONT MEASURING INTERFEROMETER FOR TESTING OPTICAL SURFACES AND LENSES [J].

BRUNING, JH ;

HERRIOTT, DR ;

GALLAGHER, JE ;

ROSENFELD, DP ;

WHITE, AD ;

BRANGACCIO, DJ .

APPLIED OPTICS, 1974, 13 (11) :2693-2703

[4] Phase-shifting interferometry with uncalibrated phase shifts [J].

Chen, X ;

Gramaglia, M ;

Yeazell, JA .

APPLIED OPTICS, 2000, 39 (04) :585-591

[5]

Creath K., 1988, Progress in optics. Vol.XXVI, P349, DOI 10.1016/S0079-6638(08)70178-1

[6]

CREATH K, 1992, OPTICAL SHOP TESTING, P687

[7]

GALLAGHER JE, 1972, Patent No. 3694088

[8] GENERALIZED DATA REDUCTION FOR HETERODYNE INTERFEROMETRY [J].

GREIVENKAMP, JE .

OPTICAL ENGINEERING, 1984, 23 (04) :350-352

[9] DIGITAL PHASE-STEPPING INTERFEROMETRY - EFFECTS OF MULTIPLY REFLECTED BEAMS [J].

HARIHARAN, P .

APPLIED OPTICS, 1987, 26 (13) :2506-2507

[10]

LUNA E, 2004, RT200418 U AUT NAC M

← 1 2 →