No back-pressure effect micro-dispenser suction pump

被引:0
作者
Lu, Chun-Fu [1 ]
Yang, Jinn-Cherng [2 ]
Fu, Chien-Chung [1 ]
机构
[1] Natl Tsing Hua Univ, Inst Misroelectmech Syst, Hsinchu 300, Taiwan
[2] Ind Technol Res Inst, Elect & Optoelect Labs, Bldg 51, 195 Sec 4,Chun Hsing Rd, Hsinchu 310, Taiwan
来源
2006 INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY CONFERENCE TAIWAN (IMPACT), PROCEEDINGS | 2006年
关键词
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The PZT actuated porous membrane device with micro-scale nozzle array and generating the micro-scale liquid droplet with maximum flow rate of 20 ml/min is developed in this study. It could be used in the application of CPU cooling. It consists the advantages of simple and easily manufactured of the structure with PZT actuator. The pumping flow rate is independent of back-pressure and negative pressure operation prevents leakage as system fail. Since the high latent heat transfer rate of water droplet for the liquid-vapor phase change cooling system, it removes heat from the CPU surface effectively. In order to design an efficient cooling device, it is important to study the dimensional effects of PZT actuator on the nozzle plate vibration mode and the orifice size to pick off droplet. Frequency and amplitude of the voltage used to energize the PZT transducer are important parameters that should be properly controlled in order to achieve the optimal liquid break-up conditions. It also reveals the low noise and power consumption with some appropriate operational conditions.
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页码:69 / +
页数:2
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