Electrostatic detachment of an adhering particle from a micromanipulated probe

被引:48
作者
Saito, S [1 ]
Himeno, H [1 ]
Takahashi, K [1 ]
机构
[1] Tokyo Inst Technol, Grad Sch Sci & Engn, Dept Int Dev Engn, Meguro Ku, Tokyo 1528552, Japan
关键词
D O I
10.1063/1.1537452
中图分类号
O59 [应用物理学];
学科分类号
摘要
During micromanipulation, the influence of gravitational force becomes extremely small. The adhesional force is more significant for smaller objects. An adhered object can be detached by electrostatic interaction. In our earlier study, the electrostatic force generated by an applied voltage and the voltage required for detachment have been theoretically analyzed using the boundary element method (BEM). The system consists of a manipulation probe, a spherical microparticle, and a substrate plate. These objects are all conductive. In this study, the voltage for detachment of a microparticle with a 30-mum diameter is experimentally clarified, and is revealed to be in good agreement with the voltage predicted by BEM analysis. In addition, phenomena other than detachment are discussed based on observations through an optical video microscope. These results provide us with knowledge about the strategy for reliable electrostatic micromanipulation. (C) 2003 American Institute of Physics.
引用
收藏
页码:2219 / 2224
页数:6
相关论文
共 11 条
  • [1] Powder particle manipulation and assemblage using microprobe
    Egashira, M
    Konno, T
    Shinya, N
    [J]. JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 1996, 7 (03) : 267 - 271
  • [2] Electric field detachment of a nonuniformly charged dielectric sphere on a dielectric coated electrode
    Feng, JQ
    Eklund, EA
    Hays, DA
    [J]. JOURNAL OF ELECTROSTATICS, 1997, 40-1 : 289 - 294
  • [3] HAYS DA, 1991, I PHYS C SER, V118, P223
  • [4] HIMENO H, 2001, P 7 INT WELD S 2001, P1251
  • [5] SURFACE ENERGY AND CONTACT OF ELASTIC SOLIDS
    JOHNSON, KL
    KENDALL, K
    ROBERTS, AD
    [J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1971, 324 (1558): : 301 - &
  • [6] Small particle adhesion: measurement and control
    Mizes, H
    Ott, M
    Eklund, E
    Hays, D
    [J]. COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2000, 165 (1-3) : 11 - 23
  • [7] Kinematics of mechanical and adhesional micromanipulation under a scanning electron microscope
    Saito, S
    Miyazaki, HT
    Sato, T
    Takahashi, K
    [J]. JOURNAL OF APPLIED PHYSICS, 2002, 92 (09) : 5140 - 5149
  • [8] Saito S., 2002, J ROBOT MECHATRON, V14, P227
  • [9] SIMPLE FORMULA FOR THE SURFACE-ENERGY BY A SHIFTED-STEP-POTENTIAL APPROXIMATION
    TAKAHASHI, K
    ONZAWA, T
    [J]. PHYSICAL REVIEW B, 1993, 48 (08): : 5689 - 5691
  • [10] INSTRUMENT FOR THE MEASUREMENT OF ADHESION FORCES IN ULTRAHIGH-VACUUM SURFACE-ANALYSIS APPARATUSES
    TAKAHASHI, K
    IIYAMA, T
    KATOH, N
    ONZAWA, T
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1994, 12 (03): : 889 - 891