Sol-gel waveguide fabrication parameters: an experimental investigation

被引：36

作者：

Du, XM ^{[1
]}

Touam, T

Degachi, L

Guilbault, JL

Andrews, MP

Najafi, SI

机构：

[1] Ecole Polytech, Photon Res Grp, Montreal, PQ H3C 3A7, Canada

[2] McGill Univ, Dept Chem, Montreal, PQ H3A 2K6, Canada

来源：

OPTICAL ENGINEERING | 1998年 / 37卷 / 04期

关键词：

photonics; integrated optics; ridge waveguide; sol-gel waveguide;

D O I：

10.1117/1.601833

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Waveguides have been fabricated by a hybrid organic-inorganic glass sol-gel process and ultraviolet-light exposure. The adjustment of chemical composition of the materials provides precise selection of the refractive index from 1.48 to 1.52 at the wavelength of 632.8 nm. The effect of ultraviolet-light exposure and heat treatment on the refractive index is studied. Ultraviolet-light inscription has been employed to produce ridge waveguides with smooth sidewalls. (C) 1998 Society of Photo-Optical Instrumentation Engineers.

引用

页码：1101 / 1104

页数：4