An ink-jet-deposited passive component process for RFID

被引：162

作者：

Redinger, D ^{[1
]}

Molesa, S ^{[1
]}

Yin, S ^{[1
]}

Farschi, R ^{[1
]}

Subramanian, V ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 2004年 / 51卷 / 12期

基金：

美国国家科学基金会;

关键词：

ink-jet printing; passive circuits; printed circuit fabrication; lithography;

D O I：

10.1109/TED.2004.838451

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An all ink-jet-deposited process capable of creating high-quality passive devices suitable for an RFID front-end is described. Gold nanocrystals are printed to create conductive lines with sheet resistance as low as 23 mf? per square. Optimal printing conditions are found for polyimide dielectric layers and films as thin as 340 nm are produced. These results are used to create spiral inductors, interconnect, and parallel plate capacitors.

引用

页码：1978 / 1983

页数：6

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