Recent deposition techniques of DLC and diamond films and their properties

被引：0

作者：

Tanaka, A ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Carbon Mat, Tsukuba, Ibaraki 3058565, Japan

来源：

JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2002年 / 47卷 / 11期

关键词：

DLC film; diamond film; plasma CVD; ion beam deposition; PBII; magnetron sputter; friction; wear; hardness;

D O I：

暂无

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：802 / 808

页数：7

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