Recent deposition techniques of DLC and diamond films and their properties

被引：0
作者：
Tanaka, A [1 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Carbon Mat, Tsukuba, Ibaraki 3058565, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2002年 / 47卷 / 11期
关键词：
DLC film; diamond film; plasma CVD; ion beam deposition; PBII; magnetron sputter; friction; wear; hardness;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：802 / 808
页数：7
相关论文
共 50 条
  • [1] Deposition technology and application of DLC and diamond films
    Miyake, Shojiro
    JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 2007, 52 (01) : 34 - 39
  • [2] Tribological properties of diamond-like carbon films produced by different deposition techniques
    Suzuki, M
    Watanabe, T
    Tanaka, A
    Koga, Y
    DIAMOND AND RELATED MATERIALS, 2003, 12 (10-11) : 2061 - 2065
  • [3] Influence of diamond and graphite bonds on mechanical properties of DLC thin films
    Pisarik, Petr
    Jelinek, Miroslav
    Kocourek, Tomas
    Remsa, Jan
    Zemek, Josef
    Lukes, Jaroslav
    Sepitka, Josef
    23RD INTERNATIONAL LASER PHYSICS WORKSHOP (LPHYS'14), 2015, 594
  • [4] Tribological properties of nanocrystalline diamond films deposited by hot filament chemical vapor deposition
    Kumar, N.
    Panda, K.
    Dash, S.
    Popov, C.
    Reithmaier, J. P.
    Panigrahi, B. K.
    Tyagi, A. K.
    Raj, Baldev
    AIP ADVANCES, 2012, 2 (03)
  • [5] Deposition of hard thin films and their tribological properties
    Tanaka, A
    JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 2001, 46 (07) : 558 - 563
  • [6] Effects of post-deposition annealing on structure and mechanical properties of multilayer Ti/DLC films
    Song, Zicheng
    Liu, Yiming
    Jiang, Shangzhe
    Jiang, Xiaohong
    Piliptsou, D. G.
    Rogachev, A. V.
    DIAMOND AND RELATED MATERIALS, 2024, 147
  • [7] Mechanical properties of high-density diamond like carbon (HD-DLC) films prepared using filtered arc deposition
    Yasui, Haruyuki
    Taki, Makoto
    Hasegawa, Yushi
    Takago, Shigeki
    SURFACE & COATINGS TECHNOLOGY, 2011, 206 (05) : 1003 - 1006
  • [8] STRUCTURE AND MECHANICAL PROPERTIES OF DIAMOND-LIKE CARBON (DLC) COATINGS DOPED WITH SILICON
    Milewski, K.
    Madej, M.
    METALURGIJA, 2020, 59 (04): : 481 - 484
  • [9] Effect of Deposition Parameters on Nano-Mechanical Properties of DLC Films by PECVD
    Lan, H.
    Kato, T.
    ADVANCED TRIBOLOGY, 2009, : 682 - +
  • [10] Deposition and friction properties of DLC films with micro-crater-like structures
    Zheng, J.-H. (zhengjh2005@yahoo.com.cn), 1600, Chinese Academy of Sciences (22):
12345