Novel nonlithographic quantum wire array fabrication

被引:2
|
作者
Das, Biswajit [1 ]
Singaraju, Pavan [1 ]
机构
[1] Univ Nevada, Dept Elect & Comp Engn, Las Vegas, NV 89154 USA
来源
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES | 2007年 / 36卷 / 02期
关键词
quantum wire heterostructures; nonlithographic nanowires;
D O I
10.1016/j.physe.2005.10.015
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have developed a novel nonlithographic technique for the fabrication of large arrays of quantum wires with complex layered structures that will find applications in many fields. The technique is based on an image reversal process to form an array of tantalum oxide nano-pillars that are used as masks for the etching of epitaxially grown semiconductor layers on an arbitrary substrate. This technique can be used to form quantum wires of complex layered structures that are essential for most practical applications. We have developed the technology to create quantum wires of silicon, however, the technique can be extended to any other material system. (c) 2006 Published by Elsevier B.V.
引用
收藏
页码:133 / 139
页数:7
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