Stroboscopic interferometer with variable magnification to measure dynamics in an adaptive-optics micromirror

被引：9

作者：

Rembe, C ^{[1
]}

Hart, M ^{[1
]}

Helmbrecht, MA ^{[1
]}

Srinivasan, U ^{[1
]}

Muller, RS ^{[1
]}

Lau, KY ^{[1
]}

Howe, RT ^{[1
]}

机构：

[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA

来源：

2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS | 2000年

关键词：

D O I：

10.1109/OMEMS.2000.879632

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Interferometry has proven a powerful tool to measure out-of-plane movements in MEMS with high accuracy. In this paper, we demonstrate a setup for stroboscopic interferometry that combines the precise data registration obtained by combining phase-shifting techniques with the high spatial resolution and aperture that are characteristic for an optical microscope.

引用

页码：73 / 74

页数：2