Review on the Modeling of Electrostatic MEMS

被引：140
作者：
Chuang, Wan-Chun [2 ]
Lee, Hsin-Li [3 ]
Chang, Pei-Zen [2 ]
Hu, Yuh-Chung [1 ]
机构：
[1] Natl ILan Univ, Ctr Green Technol, Dept Mech & Electromech Engn, Ilan, Taiwan
[2] Natl Taiwan Univ, Inst Appl Mech, Taipei, Taiwan
[3] Ind Technol Res Inst, MicroSyst Technol Ctr, Taipei, Taiwan
来源：
SENSORS | 2010年 / 10卷 / 06期
关键词：
electrostatics; electromechanics; MEMS; pull-in voltage; PULL-IN VOLTAGE; OPTIMAL SHAPE DESIGN; NONLINEAR DYNAMICS; POLYSILICON MEMS; SENSORS SUBJECT; CLOSED-FORM; MULTISCALE ANALYSIS; RESONANT MICROBEAM; COMB DRIVE; CANTILEVER;
D O I：
10.3390/s100606149
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.
引用
收藏
页码：6149 / 6171
页数：23
相关论文
共 132 条
[51]   Fracture toughness of polysilicon MEMS devices [J].
Kahn, H ;
Tayebi, N ;
Ballarini, R ;
Mullen, RL ;
Heuer, AH .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) :274-280
[52]  
Kamisuki S., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P793, DOI 10.1109/MEMSYS.2000.838619
[53]   The effects of radiation on MEMS accelerometers [J].
Knudson, AR ;
Buchner, S ;
McDonald, P ;
Stapor, WJ ;
Campbell, AB ;
Grabowski, KS ;
Knies, DL ;
Lewis, S ;
Zhao, Y .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1996, 43 (06) :3122-3126
[54]   Surface engineering and microtribology for microelectromechanical systems [J].
Komvopoulos, K .
WEAR, 1996, 200 (1-2) :305-327
[55]   Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force [J].
Krylov, S ;
Maimon, R .
JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2004, 126 (03) :332-342
[56]  
Krylov S, 2008, PROC IEEE MICR ELECT, P499
[57]   The pull-in behavior of electrostatically actuated bistable microstructures [J].
Krylov, Slava ;
Ilic, Bojan R. ;
Schreiber, David ;
Seretensky, Shimon ;
Craighead, Harold .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (05)
[58]   Higher order correction of electrostatic pressure and its influence on the pull-in behavior of microstructures [J].
Krylov, Slava ;
Seretensky, Shimon .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (07) :1382-1396
[59]   The nonlinear electrostatic behavior for shaped electrode actuators [J].
Kuang, JH ;
Chen, CJ .
INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2005, 47 (08) :1172-1190
[60]   Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experiment [J].
Lee, Jin Woo ;
Tung, Ryan ;
Raman, Arvind ;
Sumali, Hartono ;
Sullivan, John P. .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (10)
12345678910