Review on the Modeling of Electrostatic MEMS

被引：139

作者：

Chuang, Wan-Chun ^{[2
]}

Lee, Hsin-Li ^{[3
]}

Chang, Pei-Zen ^{[2
]}

Hu, Yuh-Chung ^{[1
]}

机构：

[1] Natl ILan Univ, Ctr Green Technol, Dept Mech & Electromech Engn, Ilan, Taiwan

[2] Natl Taiwan Univ, Inst Appl Mech, Taipei, Taiwan

[3] Ind Technol Res Inst, MicroSyst Technol Ctr, Taipei, Taiwan

来源：

SENSORS | 2010年 / 10卷 / 06期

关键词：

electrostatics; electromechanics; MEMS; pull-in voltage; PULL-IN VOLTAGE; OPTIMAL SHAPE DESIGN; NONLINEAR DYNAMICS; POLYSILICON MEMS; SENSORS SUBJECT; CLOSED-FORM; MULTISCALE ANALYSIS; RESONANT MICROBEAM; COMB DRIVE; CANTILEVER;

D O I：

10.3390/s100606149

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

引用

页码：6149 / 6171

页数：23

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