Cantilever probes for SNOM applications with single and double aperture tips

In this paper we introduce a cantilever-based probe concept combining Scanning force microscopy (SFM) and scanning near-held optical microscopy (SNOM). Microstructure technology processes are used to fabricate probes with hollow-metal aperture tips of less than 60 nm aperture size integrated in the very end of a cantilever. Probe characterization revealed reproducible optical and mechanical properties for both SFM and SNOM applications. The dependence of the optical transmission of aperture tips on their aperture size was investigated as a function of the polarization state. To determine the lateral resolution in the optical transmission-mode polarization-dependent measurements on microfabricated test samples, e.g. grid-like structures, were performed. Preliminary results of the investigation of Garnet samples in a near-field Faraday microscope set-up are presented. (C) 1998 Elsevier Science B.V. All rights reserved.