Effects of electrical current and temperature on contamination-induced degradation in ohmic switch contacts

被引:14
作者
Brand, Vitali [1 ]
Saleh, Mohamed E. [1 ]
de Boer, Maarten P. [1 ]
机构
[1] Carnegie Mellon Univ, Dept Mech Engn, Pittsburgh, PA 15213 USA
基金
美国国家科学基金会;
关键词
Electric contact; Hydrocarbon; Chemical analysis-Raman and Auger spectroscopy; Contact temperature; AMORPHOUS-CARBON; MEMS SWITCHES; RAMAN; HYDROCARBONS; ADSORPTION; GRAPHITE; LOGIC; FILMS; CMOS;
D O I
10.1016/j.triboint.2015.01.001
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
As scaling of silicon-based metal oxide semiconductor field effect transistor approaches its limits, the ohmic switch has recently been regarded as a viable alternative or complementary technology. However, the electrical contacts in these devices are prone to contamination from ambient hydrocarbons that reduces signal transmission through the switch. In this work we report how two key parameters, electrical current and temperature, affect contaminant-induced degradation mechanisms. It is shown that passing electrical current through the contacts significantly increases contamination growth but also increases its conductivity. We also demonstrate that increasing the ambient temperature delays and reduces the rate of contamination growth. (C) 2015 Elsevier Ltd. All rights reserved.
引用
收藏
页码:48 / 55
页数:8
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