Microstructure and mechanical properties of sputter deposited Ni/Ni3Al multilayer films at elevated temperature

被引：18

作者：

Zhang, Chao ^{[1
,2
]}

Feng, Kai ^{[1
,2
]}

Li, Zhuguo ^{[1
,2
]}

Lu, Fenggui ^{[1
,2
]}

Huang, Jian ^{[1
,2
]}

Wu, Yixiong ^{[1
,2
]}

机构：

[1] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, Shanghai Key Lab Mat Laser Proc & Modificat, Shanghai 200240, Peoples R China

[2] Collaborat Innovat Ctr Adv Ship & Deep Sea Explor, Shanghai 200240, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2016年 / 378卷

关键词：

Ni/Ni3Al multilayer; Magnetron sputtering; Hardness; Microstructure; Ordering transformation; NI3AL THIN-FILMS; NANOCRYSTALLINE NI; MICROELECTROMECHANICAL SYSTEMS; HEAT-TREATMENT; DEFORMATION; HARDNESS; NANOINDENTATION; SUPERALLOYS; BEHAVIOR; ALLOYS;

D O I：

10.1016/j.apsusc.2016.04.027

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nano-structured Ni/Ni3Al multilayer was prepared by magnetron sputtering, with individual layer thicknesses h varying from 10 to 160 nm. The microstructure and hardness of Ni/Ni3Al multilayer were investigated by X-ray diffraction, transmission electron microscopy and nanoindentation. The results show that the hardness increases with decreasing h for as-deposited and 500 degrees C annealed multilayers. When annealed at 700 degrees C, the hardness approach a peak value at h =40 nm with followed by softening at smaller h. The influence of individual layer thickness, grain size as well as formation of ordered Ni3Al on strengthening mechanisms of Ni/Ni3Al multilayers at elevated temperature are discussed. Crown Copyright (C) 2016 Published by Elsevier B.V. All rights reserved.

引用

页码：408 / 417

页数：10

共 45 条

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