Substrate effects on the CVD growth of MoS2 and WS2

被引：66

作者：

Yin, Hang ^{[1
]}

Zhang, Xudong ^{[1
]}

Lu, Jiangwei ^{[1
]}

Geng, Xuemin ^{[1
]}

Wan, Yanfen ^{[1
]}

Wu, Mingzai ^{[2
]}

Yang, Peng ^{[1
]}

机构：

[1] Yunnan Univ, Sch Mat Sci & Engn, Yunnan Key Lab Micro Nano Mat & Technol, Kunming, Yunnan, Peoples R China

[2] Anhui Univ, Sch Phys & Mat Sci, Hefei, Anhui, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE | 2020年 / 55卷 / 03期

基金：

中国国家自然科学基金;

关键词：

LARGE-AREA; LAYERS;

D O I：

10.1007/s10853-019-03993-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Chemical vapor deposition (CVD)-grown 2D materials like MoS2 and WS2 have been widely used for research and application. Here, we study substrates' effects on CVD-grown MoS2 and WS2. The morphology, crystalline quality and optical properties have been modified while changing substrates, which can be derived from lattice matching between 2D materials and substrate, defect/impurities on the interface and conductance/transparency of different substrates. The results provide suggestion for further study in CVD growth of 2D materials and device fabrications.

引用

页码：990 / 996

页数：7

共 28 条

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