Piezoelectric microvalve

被引：0
|
作者：
Ramanamurthy, P. V. M. [1 ]
Ahrens, R.
Karmalkar, S.
机构：
[1] Indian Inst Technol, Dept Elect Engn, Madras 600036, Tamil Nadu, India
[2] Forschungszentrum Karlsruhe, Inst Microstruct Technol, D-76021 Karlsruhe, Germany
来源：
INDIAN JOURNAL OF PURE & APPLIED PHYSICS | 2007年 / 45卷 / 04期
关键词：
piezoelectric microvalve; microreactor;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A normally closed microvalve is a very important component of a microfluidic system. The fabrication of an active, normally-closed piezoelectric microvalve useful for automated drug delivery or control of fluids in microreactor systems has been studied. The microvalve has dimensions of 19 mm x 19 turn x 7 mm, an inlet diameter of 200 mu m, a dead volume of 0.33 mu l and has a steady-state flow-rate of about 240 seem.
引用
收藏
页码：278 / 281
页数：4
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