Piezoelectric microvalve

被引：0
|
作者：
Ramanamurthy, P. V. M. [1 ]
Ahrens, R.
Karmalkar, S.
机构：
[1] Indian Inst Technol, Dept Elect Engn, Madras 600036, Tamil Nadu, India
[2] Forschungszentrum Karlsruhe, Inst Microstruct Technol, D-76021 Karlsruhe, Germany
来源：
INDIAN JOURNAL OF PURE & APPLIED PHYSICS | 2007年 / 45卷 / 04期
关键词：
piezoelectric microvalve; microreactor;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A normally closed microvalve is a very important component of a microfluidic system. The fabrication of an active, normally-closed piezoelectric microvalve useful for automated drug delivery or control of fluids in microreactor systems has been studied. The microvalve has dimensions of 19 mm x 19 turn x 7 mm, an inlet diameter of 200 mu m, a dead volume of 0.33 mu l and has a steady-state flow-rate of about 240 seem.
引用
收藏
页码：278 / 281
页数：4
相关论文
共 50 条
  • [21] A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems
    Roberts, DC
    Li, HQ
    Steyn, JL
    Yaglioglu, O
    Spearing, SM
    Schmidt, MA
    Hagood, NW
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2003, 12 (01) : 81 - 92
  • [22] Gradient generation with active mixing by a novel microvalve using tailor-made multilayer piezoelectric actuator (TAMPA)
    Toda, Naoya
    Motoo, Kohei
    Arai, Fumihito
    Fukuda, Toshio
    Sekiyama, Kosuke
    Nakajima, Masahiro
    2007 INTERNATIONAL SYMPOSIUM ON MICRO-NANO MECHATRONICS AND HUMAN SCIENCE, VOLS 1 AND 2, 2007, : 225 - +
  • [23] A BIMETALLIC SILICON MICROVALVE
    OCONNOR, L
    MECHANICAL ENGINEERING, 1995, 117 (01) : 30 - &
  • [24] Microvalve for harsh environment
    Seeley, C
    Fortin, J
    Wetzel, T
    Sealing, S
    Fosen, K
    ELECTRONIC AND PHOTONIC PACKAGING, ELECTRICAL SYSTEMS AND PHOTONIC DESIGN AND NANOTECHNOLOGY - 2003, 2003, : 183 - 192
  • [25] Understanding microvalve technology
    Jerman, Hal
    Dunbar, Michael
    Sensors (Peterborough, NH), 1994, 11 (09):
  • [26] SMA microactuators for microvalve applications
    Kohl, M
    Liu, Y
    Krevet, B
    Dürr, S
    Ohtsuka, M
    JOURNAL DE PHYSIQUE IV, 2004, 115 : 333 - 342
  • [27] ELECTROSTATICALLY ACTUATED COMPLIANT MICROVALVE
    Dankovic, Tatjana
    Feinerman, Alan
    INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION - 2012, VOL 9, PTS A AND B, 2013, : 721 - 729
  • [28] A BISTABLE SHAPE MEMORY MICROVALVE
    Barth, J.
    Megnin, C.
    Kohl, M.
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 1067 - 1070
  • [29] A thermopneumatically actuated bistable microvalve
    Yang, Bocong
    Wang, Boxiong
    Schomburg, Werner Karl
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (09)
  • [30] High performance microvalve array
    Lee, Dong Gun
    Shin, Daniel D.
    Carman, Gregory P.
    MICRO-ELECTRO-MECHANICAL SYSTEMS - 2005, 2005, 7 : 611 - 615
12345