Enhancing the Responsivity of Uncooled Infrared Detectors Using Plasmonics for High-Performance Infrared Spectroscopy

被引：16

作者：

Ahmed, Amr Shebl ^{[1
]}

Kim, Hye Jin ^{[2
]}

Kim, Jinsik ^{[3
]}

Hwang, Kyo Seon ^{[4
]}

Kim, Seonghwan ^{[1
]}

机构：

[1] Univ Calgary, Dept Mech & Mfg Engn, Calgary, AB T2N 1N4, Canada

[2] Korea Inst Sci & Technol, Ctr BioMicrosyst, Seoul 02792, South Korea

[3] Dongguk Univ, Dept Med Biotechnol, Seoul 10326, South Korea

[4] Kyung Hee Univ, Dept Clin Pharmacol & Therapeut, Seoul 02447, South Korea

来源：

SENSORS | 2017年 / 17卷 / 04期

基金：

加拿大自然科学与工程研究理事会;

关键词：

plasmonics; infrared detector; MEMS; gas sensing; DESIGN; FILMS;

D O I：

10.3390/s17040908

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A lead zirconate titanate (PZT; Pb(Zr0.52Ti0.48)O-3) layer embedded infrared (IR) detector decorated with wavelength-selective plasmonic crystals has been investigated for high-performance non-dispersive infrared (NDIR) spectroscopy. A plasmonic IR detector with an enhanced IR absorption band has been designed based on numerical simulations, fabricated by conventional microfabrication techniques, and characterized with a broadly tunable quantum cascade laser. The enhanced responsivity of the plasmonic IR detector at specific wavelength band has improved the performance of NDIR spectroscopy and pushed the limit of detection (LOD) by an order of magnitude. In this paper, a 13-fold enhancement in the LOD of a methane gas sensing using NDIR spectroscopy is demonstrated with the plasmonic IR detector.

引用

页数：11

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