In Situ Poly Heater-A Reliable Tool for Performing Fast and Defined Temperature Switches on Chip

被引：30

作者：

Aichinger, Thomas ^{[1
,2
,3
]}

Nelhiebel, Michael ^{[2
]}

Einspieler, Sascha ^{[1
,4
]}

Grasser, Tibor ^{[3
]}

机构：

[1] Kompetenzzentrum Automobil & Ind Elekt, A-9524 Villach, Austria

[2] Infineon Technol Austria, A-9500 Villach, Austria

[3] TU Vienna, Inst Microelect, Christian Doppler Lab TCAD Microelect, A-1040 Vienna, Austria

[4] Carinthia Univ Appl Sci, A-9524 Villach, Austria

来源：

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY | 2010年 / 10卷 / 01期

关键词：

In situ heating; NBTI; poly heater; temperature switches; TRANSISTORS; CHANNEL;

D O I：

10.1109/TDMR.2009.2033467

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we discuss the calibration procedure and performance of the poly-heater measurement technique for device characterization and reliability issues. We put a particular emphasis on the accessible temperature range, the heating and cooling dynamics, as well as on the impact of temperature gradient between the heater, device, and thermo chuck. In this context, the poly-heater technique provides a reliable solution for fast and arbitrary temperature switches and offers the possibility to reach device temperatures that are far beyond the operating range of conventional thermo-chuck systems.

引用

页码：3 / 8

页数：6

共 13 条

[11] A reliable and accurate approach to assess NBTI behavior of state-of-the-art pMOSFETs with fast-WLR [J].

Schluender, Christian ;

Vollertsen, Rolf-Peter ;

Gustin, Wolfgang ;

Reisinger, Hans .

ESSDERC 2007: PROCEEDINGS OF THE 37TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, 2007, :131-134

[12] Ultra-fast negative bias temperature instability monitoring and end-of-life projection [J].

Wang, Chi-Shiun ;

Chang, Wen-Chun ;

Ke, Wen-Shawn ;

Su, Kuan-Cheng .

2006 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP, FINAL REPORT, 2006, :136-+

[13]

WANG CS, 2005, P SSDM, P580

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