Precision chemical engineering: integrating nanolithography and nanoassembly

被引:63
作者
Mendes, PM [1 ]
Preece, JA [1 ]
机构
[1] Univ Birmingham, Sch Chem, Birmingham B15 2TT, W Midlands, England
基金
英国工程与自然科学研究理事会;
关键词
self-assembled monolayers (SAMs); top-down nanolithography; nanopatterns; bottom-up self-assembly; three-dimensional nanoarchitectures;
D O I
10.1016/j.cocis.2004.06.005
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Precise control over functional three-dimensional nanoarchitectures and how to integrate them across different length scales is a significant challenge in nanoscience and nanoengineering. In recent years, hybrid top-down/bottom-up processes, which combines the precision of lithographic techniques and the parallelism of self-assembly-what might be termed precision chemical engineering, have been actively pursued for realising such a major task. Lithographic radiative techniques, including ultraviolet (UV) light, X-rays and electron-beam (e-beam), have been used for creating nanostructured surfaces on self-assembled monolayers (SAMs), which offer unprecedented range of surface chemical functionalities. Generation of three-dimensional nanostructures by self-organisation of self-assembled nanoscale components onto nanopatterned SAM surface templates has also been demonstrated. Nevertheless, these methodologies are in their early stages offering ample opportunity for further research and process development. (C) 2004 Elsevier Ltd. All rights reserved.
引用
收藏
页码:236 / 248
页数:13
相关论文
共 107 条
  • [1] Chemistry meets computing
    Ball, P
    [J]. NATURE, 2000, 406 (6792) : 118 - 120
  • [2] Prototype negative electron affinity-based multibeam electron gun for lithography and microscopy
    Baum, A
    Arcuni, P
    Aebi, V
    Presley, S
    Elder, M
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06): : 2819 - 2822
  • [3] NEAR-FIELD OPTICS - MICROSCOPY, SPECTROSCOPY, AND SURFACE MODIFICATION BEYOND THE DIFFRACTION LIMIT
    BETZIG, E
    TRAUTMAN, JK
    [J]. SCIENCE, 1992, 257 (5067) : 189 - 195
  • [4] NEW APPROACH TO PRODUCING PATTERNED BIOMOLECULAR ASSEMBLIES
    BHATIA, SK
    HICKMAN, JJ
    LIGLER, FS
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1992, 114 (11) : 4432 - 4433
  • [5] Fabrication of patterned amine reactivity templates using 4-chloromethylphenylsiloxane self-assembled monolayer films
    Brandow, SL
    Chen, MS
    Aggarwal, R
    Dulcey, CS
    Calvert, JM
    Dressick, WJ
    [J]. LANGMUIR, 1999, 15 (16) : 5429 - 5432
  • [6] Brandow SL, 2001, CHEM-EUR J, V7, P4495, DOI 10.1002/1521-3765(20011015)7:20<4495::AID-CHEM4495>3.0.CO
  • [7] 2-Q
  • [8] Oxidation of self-assembled monolayers by UV light with a wavelength of 254 nm
    Brewer, NJ
    Rawsterne, RE
    Kothari, S
    Leggett, GJ
    [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2001, 123 (17) : 4089 - 4090
  • [9] Electron-beam microcolumns for lithography and related applications
    Chang, THP
    Thomson, MGR
    Kratschmer, E
    Kim, HS
    Yu, ML
    Lee, KY
    Rishton, SA
    Hussey, BW
    Zolgharnain, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 3774 - 3781
  • [10] Rates of attachment of fibroblasts to self-assembled monolayers formed by the adsorption of alkylthiols onto gold surfaces
    Cooper, E
    Wiggs, R
    Hutt, DA
    Parker, L
    Leggett, GJ
    Parker, TL
    [J]. JOURNAL OF MATERIALS CHEMISTRY, 1997, 7 (03) : 435 - 441