Dielectric properties of internal capacitors in co-fired ceramic substrates

被引：4

作者：

Chen, LS ^{[1
]}

Fu, SL ^{[1
]}

Lin, WK ^{[1
]}

Huang, KD ^{[1
]}

机构：

[1] I Shou Univ, Dept Elect Engn, Kaohsiung, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2000年 / 39卷 / 5A期

关键词：

barium titanate; co-fired; internal; capacitor; dielectric properties;

D O I：

10.1143/JJAP.39.2675

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Dielectric properties of barium titanate-based internal capacitors characterized by capacitance, dissipation factor, and temperature change in capacitance are reported. A capacitance of about 10 nF/cm(2) with the dissipation factor of 2.3% is obtained for the BaTi0.975O3 + 2 wt% LiF internal capacitor after being co-fired with low dielectric constant ceramic substrates at 900 degrees C. The percent change of capacitance is confined within +/-10%. The dissipation factor is stable and decreases with increasing temperature.

引用

页码：2675 / 2679

页数：5

共 22 条

[1]

Amin R.B., 1978, U. S. Pat, Patent No. 4082906

[2] HIGH-RELIABILITY INTERNAL CAPACITOR OF LTCC [J].

BABA, Y ;

OCHI, H ;

SEGAWA, S .

IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART A, 1995, 18 (01) :170-173

[3] Construction, characterization, and reliability of BaTiO3-based buried thick film capacitor materials sets, 1200<K<1600 [J].

Bolton, PJ ;

Velasquez, R ;

Mason, RC .

1998 INTERNATIONAL CONFERENCE ON MULTICHIP MODULES AND HIGH DENSITY PACKAGING, PROCEEDINGS, 1998, :484-489

[4]

BROWN RL, 1993, J MICROCIRC ELECT PA, V16, P328

[5]

BUCHANAN RC, 1991, CERAMIC MAT ELECT PR, P76

[6] FLUX-SINTERED BATIO3 DIELECTRICS [J].

BURN, I .

JOURNAL OF MATERIALS SCIENCE, 1982, 17 (05) :1398-1408

[7] Barium titanate-based capacitors buried into ceramic substrates [J].

Chen, LS ;

Fu, SL ;

Huang, KD .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1998, 37 (10B) :L1241-L1243

[8] Characterization and performance prediction for integral capacitors in low temperature co-fired ceramic technology [J].

Delaney, K ;

Barrett, J ;

Barton, J ;

Doyle, R .

IEEE TRANSACTIONS ON ADVANCED PACKAGING, 1999, 22 (01) :68-77

[9] Characterisation of the electrical performance of buried capacitors and resistors in low temperature co-fired (LTCC) ceramic [J].

Delaney, K ;

Barrett, J ;

Barton, J ;

Doyle, R .

48TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 1998 PROCEEDINGS, 1998, :900-908

[10]

DESGARDIN G, 1985, AM CERAM SOC BULL, V64, P564

← 1 2 3 →