Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer

被引：3

作者：

Tunstall, JJ ^{[1
]}

Taylor, S ^{[1
]}

Syms, RRA ^{[1
]}

Tate, T ^{[1
]}

Ahmad, MM ^{[1
]}

机构：

[1] Univ Liverpool, Dept Elect Engn & Elect, Liverpool L69 3GJ, Merseyside, England

来源：

MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS | 1998年

关键词：

D O I：

10.1109/MEMSYS.1998.659797

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This article considers design, realisation and initial tests of a Quadrupole Mass Spectrometer with a novel silicon micromachined mass filter. The construction of this device is discussed along with its mounting on a conventional ion source and testing in a vacuum system. Results are presented for the operation of this mass lens including a mass spectrum, and the effect of cage voltage, emission current and pressure on the performance.

引用

页码：438 / 442

页数：3