High-Precision Calibration of Indenter Area Function and Instrument Compliance

The accuracy and comparability of nanoindentation results depend significantly on the calibration of area function and instrument compliance. The area function results should not depend on the reference material used or on the calibration method (direct or indirect). This has been investigated for 18 different Berkovich tips. A novel calibration method is proposed that confirms the material independence of the area function and gives a force-dependent instrument compliance function. An agreement between direct and indirect calibration could only be achieved by considering a radial displacement correction. Further, it is shown that the transition range from a spherical cap to the correct face angle of the pyramid can extend to a depth of more than 250 nm. A better parameter for the indenter than the tip radius is the offset of the contact radius to the radius of an ideal tip at a depth where the correct face angle is reached.