Fabrication of Si(111) crystalline thin film on graphene by aluminum-induced crystallization

被引:2
作者
Hoiaas, I. M. [1 ]
Kim, D. C. [1 ,2 ]
Weman, H. [1 ,2 ]
机构
[1] Norwegian Univ Sci & Technol, Dept Elect & Telecommun, NO-7491 Trondheim, Norway
[2] CrayoNano AS, Otto Nielsens Vei 12, NO-7052 Trondheim, Norway
关键词
AMORPHOUS-SILICON; POLYCRYSTALLINE SILICON; LAYER EXCHANGE; SOLAR-CELLS; TEMPERATURE; SI; SUBSTRATE; MOBILITY; STRAIN;
D O I
10.1063/1.4947101
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the fabrication of a Si(111) crystalline thin film on graphene by the aluminum-induced crystallization (AIC) process. The AIC process of Si(111) on graphene is shown to be enhanced compared to that on an amorphous SiO2 substrate, resulting in a more homogeneous Si(111) thin film structure as revealed by X-ray diffraction and atomic force microscopy measurements. Raman measurements confirm that the graphene is intact throughout the process, retaining its characteristic phonon spectrum without any appearance of the D peak. A red-shift of Raman peaks, which is more pronounced for the 2D peak, is observed in graphene after the crystallization process. It is found to correlate with the red-shift of the Si Raman peak, suggesting an epitaxial relationship between graphene and the adsorbed AIC Si(111) film with both the graphene and Si under tensile strain. (C) 2016 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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页数:5
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