[1] Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Terahertz Sci & Technol Res Ctr, Chengdu 610054, Sichuan, Peoples R China
[2] Sichuan Univ, Coll Mat Sci & Engn, Chengdu 610065, Sichuan, Peoples R China
[3] Hebei Semicond Res Inst, Natl Key Lab Applicat Specif Integrated Circuit, Shijiazhuang 050051, Hebei, Peoples R China